MEMS-Komponenten (MEMS Devices)

JENOPTIK Microoptics has the knowledge and tools to perform detailed design and analysis for a variety of micro machined devices. Finite element analysis tools, process simulation tools and custom codes are used to perform detailed design and analysis services. Manufacturability is always taken into consideration during the design phase. A state of the art in house fabrication facility allows quick turns on manufacturing and unique process solutions to your most difficult challenges.

Two Axis Tilt Mirrors

The scanning two axis tilt mirror is an important technology that can be used in many industries. Two axis scanning allows these mirrors to have a full 360° of rotation at up to a 3° tilt angle. There are several major benefits of the JENOPTIK Microoptics tilt mirror over competing products.

• The tilt angle is analog as opposed to on-off.
• There are no holes in the mirror surface, allowing for full reflection of all impinging light.
• Low voltages ar­e required for actuation. A total of less than 120 volts is required for the full 3° of tilt and less voltage is required for less tilt.

Features

• Full 360° of rotation
• Up to 3° tilt angle
• Surface free of (release) holes
• Low voltages required for actuation