Diffraktive Optische Elemente für off-axis Beleuchtung
(Diffractive Optical Elements for off-axis Illumination)

Multipole pupil illumination patterns are required to achieve the highest resolution in mask projection systems.

Diffractive Optical Elements (DOE) by Jenoptik efficiently generate such patterns with high precision and uniformity.

The use of high-quality materials for the Jenoptik DOE results in high lifetime even under intense ultraviolet laser irradiation.

Features

• Precise, homogeneous multipole illumination
• Arbitrary illumination patterns
• Highest efficiency by multilevel diffractive structures
• Cost-efficient binary DOE
• High damage threshold and lifetime