Laser machines for laser annealing

Laser activation of wafers

Laser machine JENOPTIK-VOTAN™ Semi 700

Certain processes in the manufacturing of semiconductor components such as dopant activation require high temperatures. If there are temperature-sensitive structures or materials on the wafer at the same time, local heating by laser is mostly the only way to obtain the desired process result without damaging other areas.

With the JENOPTIK-VOTAN Semi 700 Jenoptik offers a laser system developed for that kind of application, e.g. manufacturing of power transistors or CMOS image sensors. The system is characterized by excellent process uniformity and high flexibility concerning different process requirements.

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