Semiconductor Equipment Modules

Ensuring high yield is a key factor in the successful and profitable production of microchips. Jenoptik manufactures customer-specific optical modules, DUV lenses and assemblies, which are successfully used to enhance performance in the chip production process and in optical process control systems for the semiconductor industry.

Based on the latest developments in the field of laser sources, we produce solutions for the entire DUV wavelength range with the emphasis on 193 nm to EUV, and are consequently able to provide high-quality imaging (wavefront error < 0.035λ in DUV wavelengths) on a series-production scale.

We offer our customers the full process chain, from development to series production, and we also realize feasibility studies.
We would be pleased to support you in devising an appropriate system solution.