Inspection Objective Lenses for the Semiconductor Industry

Optical inspection processes play a key role in the semiconductor industry in meeting highest  requirements concerning zero defect demands. Jenoptik provides customized DUV lenses and assemblies as well as optical modules, which are successfully deployed in optical process control systems for the semiconductor industry to enhance performance.
Based on cutting-edge developments in the field of laser sources, we produce solutions for the entire DUV wavelength range with the emphasis on 193 nm to EUV, and consequently are able to provide high-quality imaging (wavefront errors < 0.035 λ in DUV wavelengths) on a series-production scale.

Utilize the benefits of Jenoptik’s inspection lenses and our in-depth development and production know-how. We develop customized lenses based on your specific requirements, and offer the complete process chain, ranging from development to series production. We would also be pleased to carry out feasibility studies for you.