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Jenoptik subsidiary expands its status as supplier to ASML considerably and receives order over five years

JENOPTIK Laser, Optik, Systeme GmbH is supplier of special components for wafer steppers.

JENOPTIK Laser, Optik, Systeme GmbH has signed a long-term outline agreement with ASML for the delivery of binary optics products. ASML is a global leader in the production of lithographic systems (wafer steppers and Step & Scan Systems) for the semiconductor industry. JENOPTIK Laser, Optik, Systeme GmbH, the managing company of Jenoptik's Photonics Technologies business division, is to deliver special binary optics components for ASML's lithography systems over a period of at least five years.

Binary optics components assure exact chip structures.

The miniaturized reproduction of chip structures onto the photo masks of silicon wafers is necessary several times in the production of semiconductor components. The exposure of the wafers takes place in lithographic systems. Binary optics components are needed for the exact alignment of the wafers in the systems' image fields as well as for the observation and correction of the projection properties. Precisely stacked functional layers can be placed on chips with the assistance of the binary optics components. ASML and JENOPTIK expect that later generations of chips will be able to make use of this technology, and have therefore agreed to work together on a long-term basis.

With the new agreement, Jenoptik and ASML have extended the successful cooperative ties that they have maintained since 1992. Jenoptik, for instance, supplies ASML with optics packages for wafer alignment and for laser beam delivery.